00543nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002300119245005300142260003200195300002000227490003400247856010400281IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510609938 (Print)  a9781510609945 (Online)  cIIA Library  aFonseca, Luis, ed. 0aSmart Sensors, Actuators, and MEMS VIIIh[eBook]  aWashington, USAbSPIEc2017  aOnline resource  aProceedings of SPIE; V. 10246  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10246yClick Here to Access eBook