Fonseca, Luis, ed. <br/><br/>
Smart Sensors, Actuators, and MEMS VIII  [eBook] 

 - Washington, USA  SPIE  2017 
 - Online resource 
 - Proceedings of SPIE; V. 10246 .
<br/><br/><label>ISBN: </label>9781510609938 (Print) 9781510609945 (Online)