TY - BOOK AU - Sánchez-Rojas Aldavero, José Luis, ed. TI - Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems T2 - Proceedings of SPIE; V. 9517 SN - 9781628416398 (Print) PY - 2015/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9517 ER -