00553nam a2200145Ia 4500003000900000008004100009020002600050040001600076100004700092245008000139260003200219300002000251490003300271856010300304IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628416398 (Print)  cIIA Library  aSánchez-Rojas Aldavero, José Luis, ed. 0aSmart Sensors, Actuators, and MEMS VII; and Cyber Physical Systemsh[eBook]  aWashington, USAbSPIEc2015  aOnline resource  aProceedings of SPIE; V. 9517  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9517yClick Here to Access eBook