TY  - BOOK
AU  - Schmid, Ulrich, ed.
TI  - Smart Sensors, Actuators, and MEMS VI
T2  - Proceedings of SPIE; V. 8763
SN  - 9780819495600 (Print)
PY  - 2013///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8763
ER  -