00501nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245005100116260003200167300002000199490003300219856010300252IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819495600 (Print)  cIIA Library  aSchmid, Ulrich, ed. 0aSmart Sensors, Actuators, and MEMS VIh[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 8763  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8763yClick Here to Access eBook