@book{32455,
	author = {Schmid, Ulrich, ed.},
	title = {Smart Sensors, Actuators, and MEMS VI},
	publisher = {SPIE},
	year = {2013},
	series = {Proceedings of SPIE; V. 8763},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8763}
}