TY  - BOOK
AU  - Schmid, Ulrich, ed.
TI  - Smart Sensors, Actuators, and MEMS V
T2  - Proceedings of SPIE; V. 8066
SN  - 9780819486554 (Print)
PY  - 2011///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8066
ER  -