TY  - BOOK
AU  - Schmid, Ulrich, ed.
TI  - Smart Sensors, Actuators, and MEMS IV
T2  - Proceedings of SPIE; V. 7362
SN  - 9780819476364 (Print)
PY  - 2009///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7362
ER  -