TY  - BOOK
AU  - Becker, Thomas, ed.
TI  - Smart Sensors, Actuators, and MEMS III
T2  - Proceedings of SPIE; V. 6589
SN  - 9780819467171 (Print)
PY  - 2007///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6589
ER  -