@book{32452,
	author = {Becker, Thomas, ed.},
	title = {Smart Sensors, Actuators, and MEMS III},
	publisher = {SPIE},
	year = {2007},
	series = {Proceedings of SPIE; V. 6589},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6589}
}