TY  - BOOK
AU  - Cané, Carles, ed.
TI  - Smart Sensors, Actuators, and MEMS II
T2  - Proceedings of SPIE; V. 5836
SN  - 9780819458315 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5836
ER  -