@book{32451,
	author = {Cané, Carles, ed.},
	title = {Smart Sensors, Actuators, and MEMS II},
	publisher = {SPIE},
	year = {2005},
	series = {Proceedings of SPIE; V. 5836},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5836}
}