TY  - BOOK
AU  - Chiao, Jung-Chih, ed.
TI  - Smart Sensors, Actuators, and MEMS
T2  - Proceedings of SPIE; V. 5116
SN  - 9780819449764 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5116
ER  -