@book{32450,
	author = {Chiao, Jung-Chih, ed.},
	title = {Smart Sensors, Actuators, and MEMS},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5116},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5116}
}