TY  - BOOK
AU  - Hariz, Alex, ed.
TI  - Smart Electronics and MEMS
T2  - Proceedings of SPIE; V. 3242
SN  - 9780819426802 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3242
ER  -