00487nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245004000113260003200153300002000185490003300205856010300238IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819426802 (Print)  cIIA Library  aHariz, Alex, ed. 0aSmart Electronics and MEMSh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3242  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3242yClick Here to Access eBook