@book{32410,
	author = {Hariz, Alex, ed.},
	title = {Smart Electronics and MEMS},
	publisher = {SPIE},
	year = {1997},
	series = {Proceedings of SPIE; V. 3242},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3242}
}