00763nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003100092245008200123260003200205300002000237490003300257856010300290942000700393999001700400952016400417IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819471826 (Print)  cIIA Library  aShen, Wenzhong, ed.947854 0aSixth International Conference on Thin Film Physics and Applicationsh[eBook]  aWashington, USAbSPIEc2008  aOnline resource  aProceedings of SPIE; V. 6984  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6984yClick Here to Access eBook  cEB  c32371d32371  00104070aBANbBANd2011-07-01eSPIEhV. 6984l0pEB11831r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6984w2021-11-05yEB