00793nam a2200193Ia 4500003000900000008004100009020002600050020002700076040001600103100003000119245007000149260003200219300002000251490003400271856010400305942000700409999001700416952016600433IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510630512 (Print)  a9781510630529 (Online)  cIIA Library  aRascher, Rolf, ed.943435 0aSixth European Seminar on Precision Optics Manufacturingh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 11171  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11171yClick Here to Access eBook  cEB  c32355d32355  00104070aBANbBANd2011-07-01eSPIEhV. 11171l0pEB11815r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11171w2021-11-05yEB