00509nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002800092245005500120260003200175300002000207490003300227856010300260IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628413243 (Print)  cIIA Library  adu Plessis, Monuko, ed. 0aSensors, MEMS and Electro-Optical Systemsh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  aProceedings of SPIE; V. 9257  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9257yClick Here to Access eBook