00527nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245008000113260003200193300002000225490003300245856010300278IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819443410 (Print)  cIIA Library  aChen, David, ed. 0aSemiconductor Optoelectronic Device Manufacturing and Applicationsh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4602  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4602yClick Here to Access eBook