TY  - BOOK
AU  - Dey, James, ed.
TI  - Semiconductor Microlithography VI
T2  - Proceedings of SPIE; V. 0275
SN  - 9780892523085 (Print)
PY  - 1981///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0275
ER  -