@book{32054,
	author = {Dey, James, ed.},
	title = {Semiconductor Microlithography VI},
	publisher = {SPIE},
	year = {1981},
	series = {Proceedings of SPIE; V. 0275},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0275}
}