TY  - BOOK
AU  - Miyamoto, Isamu, ed.
TI  - Second International Symposium on Laser Precision Microfabrication
T2  - Proceedings of SPIE; V. 4426
SN  - 9780819441379 (Print)
PY  - 2002///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4426
ER  -