TY  - BOOK
AU  - Tanner, Danelle, ed.
TI  - Reliability, Testing, and Characterization of MEMS/MOEMS III
T2  - Proceedings of SPIE; V. 5343
SN  - 9780819452511 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5343
ER  -