Tanner, Danelle, ed. <br/><br/>
Reliability, Testing, and Characterization of MEMS/MOEMS III  [eBook] 

 - Washington, USA  SPIE  2003 
 - Online resource 
 - Proceedings of SPIE; V. 5343 .
<br/><br/><label>ISBN: </label>9780819452511 (Print)