@book{31688,
	author = {Tanner, Danelle, ed.},
	title = {Reliability, Testing, and Characterization of MEMS/MOEMS III},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5343},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5343}
}