TY  - BOOK
AU  - Ramesham, Rajeshuni, ed.
TI  - Reliability, Testing, and Characterization of MEMS/MOEMS II
T2  - Proceedings of SPIE; V. 4980
SN  - 9780819447807 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4980
ER  -