TY  - BOOK
AU  - Ramesham, Rajeshuni, ed.
TI  - Reliability, Testing, and Characterization of MEMS/MOEMS
T2  - Proceedings of SPIE; V. 4558
SN  - 9780819442864 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4558
ER  -