Ramesham, Rajeshuni, ed. <br/><br/>
Reliability, Testing, and Characterization of MEMS/MOEMS  [eBook] 

 - Washington, USA  SPIE  2001 
 - Online resource 
 - Proceedings of SPIE; V. 4558 .
<br/><br/><label>ISBN: </label>9780819442864 (Print)