00798nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003000092245011800122260003200240300002000272490003300292856010300325942000700428999001700435952016400452IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819498885 (Print)  cIIA Library  aShea, Herbert, ed.947467 0aReliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIIIh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  aProceedings of SPIE; V. 8975  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8975yClick Here to Access eBook  cEB  c31685d31685  00104070aBANbBANd2011-07-01eSPIEhV. 8975l0pEB11145r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8975w2021-11-05yEB