TY  - BOOK
AU  - Shea, Herbert, ed.
TI  - Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
T2  - Proceedings of SPIE; V. 8975
SN  - 9780819498885 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8975
ER  -