Shea, Herbert, ed. <br/><br/>
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII  [eBook] 

 - Washington, USA  SPIE  2014 
 - Online resource 
 - Proceedings of SPIE; V. 8975 .
<br/><br/><label>ISBN: </label>9780819498885 (Print)