00556nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245010100121260003200222300002000254490003300274856010300307IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819493835 (Print)  cIIA Library  aRamesham, Rajeshuni, ed. 0aReliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XIIh[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 8614  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8614yClick Here to Access eBook