@book{31684,
	author = {Ramesham, Rajeshuni, ed.},
	title = {Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII},
	publisher = {SPIE},
	year = {2013},
	series = {Proceedings of SPIE; V. 8614},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8614}
}