00538nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245008500119260003200204300002000236490003300256856010300289IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819470591 (Print)  cIIA Library  aHartzell, Allyson, ed. 0aReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VIIh[eBook]  aWashington, USAbSPIEc2008  aOnline resource  aProceedings of SPIE; V. 6884  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6884yClick Here to Access eBook