@book{31683,
	author = {Hartzell, Allyson, ed.},
	title = {Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII},
	publisher = {SPIE},
	year = {2008},
	series = {Proceedings of SPIE; V. 6884},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6884}
}