00537nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245008400119260003200203300002000235490003300255856010300288IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819465764 (Print)  cIIA Library  aHartzell, Allyson, ed. 0aReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VIh[eBook]  aWashington, USAbSPIEc2007  aOnline resource  aProceedings of SPIE; V. 6463  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6463yClick Here to Access eBook