@book{31682,
	author = {Hartzell, Allyson, ed.},
	title = {Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI},
	publisher = {SPIE},
	year = {2007},
	series = {Proceedings of SPIE; V. 6463},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6463}
}