00534nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245008300117260003200200300002000232490003300252856010300285IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819461537 (Print)  cIIA Library  aTanner, Danelle, ed. 0aReliability, Packaging, Testing, and Characterization of MEMS/MOEMS Vh[eBook]  aWashington, USAbSPIEc2006  aOnline resource  aProceedings of SPIE; V. 6111  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6111yClick Here to Access eBook