Tanner, Danelle, ed. <br/><br/>
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V  [eBook] 

 - Washington, USA  SPIE  2006 
 - Online resource 
 - Proceedings of SPIE; V. 6111 .
<br/><br/><label>ISBN: </label>9780819461537 (Print)