@book{31681,
	author = {Tanner, Danelle, ed.},
	title = {Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V},
	publisher = {SPIE},
	year = {2006},
	series = {Proceedings of SPIE; V. 6111},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6111}
}