00535nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245008400117260003200201300002000233490003300253856010300286IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819456908 (Print)  cIIA Library  aTanner, Danelle, ed. 0aReliability, Packaging, Testing, and Characterization of MEMS/MOEMS IVh[eBook]  aWashington, USAbSPIEc2005  aOnline resource  aProceedings of SPIE; V. 5716  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5716yClick Here to Access eBook