00782nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245010000124260003200224300002000256490003300276856010300309942000700412999001700419952016400436IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819488930 (Print)  cIIA Library  aGarcía-Blanco, Sonia, ed. 0aReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XIh[eBook]  aWashington, USAbSPIEc2012  aOnline resource  aProceedings of SPIE; V. 8250  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8250yClick Here to Access eBook  cEB  c31679d31679  00104070aBANbBANd2011-07-01eSPIEhV. 8250l0pEB11139r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8250w2021-11-05yEB