TY  - BOOK
AU  - García-Blanco, Sonia, ed.
TI  - Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
T2  - Proceedings of SPIE; V. 8250
SN  - 9780819488930 (Print)
PY  - 2012///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8250
ER  -