@book{31679,
	author = {García-Blanco, Sonia, ed.},
	title = {Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI},
	publisher = {SPIE},
	year = {2012},
	series = {Proceedings of SPIE; V. 8250},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8250}
}