TY  - BOOK
AU  - García-Blanco, Sonia, ed.
TI  - Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
T2  - Proceedings of SPIE; V. 7928
SN  - 9780819484659 (Print)
PY  - 2011///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7928
ER  -