00557nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003200092245009900124260003200223300002000255490003300275856010300308IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819484659 (Print)  cIIA Library  aGarcía-Blanco, Sonia, ed. 0aReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices Xh[eBook]  aWashington, USAbSPIEc2011  aOnline resource  aProceedings of SPIE; V. 7928  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7928yClick Here to Access eBook