@book{31678,
	author = {García-Blanco, Sonia, ed.},
	title = {Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X},
	publisher = {SPIE},
	year = {2011},
	series = {Proceedings of SPIE; V. 7928},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7928}
}